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Ald process controller

Skill a5c-ai/babysitter/library/specializations/domains/science/nanotechnology/skills/ald-process-controller

Atomic Layer Deposition skill for conformal thin film deposition with atomic-level thickness controlFrom its SKILL.md

Install
npx -y skills add a5c-ai/babysitter --skill ald-process-controller

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SKILL.md

2.1 KB, 369 tokens by cl100k_base, as published. Nobody here has run it

ALD Process Controller

Purpose

The ALD Process Controller skill provides comprehensive atomic layer deposition process control, enabling conformal thin film growth with atomic-level precision through optimized pulse sequences and in-situ monitoring.

Capabilities

  • Precursor pulse/purge optimization
  • Growth per cycle (GPC) characterization
  • Film uniformity mapping
  • Conformality assessment
  • In-situ monitoring integration
  • Multi-component film design

Usage Guidelines

ALD Process Control

  1. Saturation Studies

    • Vary pulse times
    • Identify saturation dose
    • Optimize purge times
  2. Process Window

    • Determine ALD window
    • Optimize temperature
    • Monitor GPC stability
  3. Film Quality

    • Characterize uniformity
    • Measure conformality
    • Assess impurity levels

Process Integration

  • Thin Film Deposition Process Optimization
  • Nanodevice Integration Process Flow

Input Schema

{
  "material": "string",
  "precursor_a": "string",
  "precursor_b": "string",
  "target_thickness": "number (nm)",
  "substrate": "string",
  "temperature": "number (C)"
}

Output Schema

{
  "optimized_recipe": {
    "precursor_a_pulse": "number (s)",
    "purge_a": "number (s)",
    "precursor_b_pulse": "number (s)",
    "purge_b": "number (s)"
  },
  "gpc": "number (Angstrom/cycle)",
  "cycles_required": "number",
  "uniformity": "number (%)",
  "conformality": "number (% step coverage)"
}

What ships with it

Read from the repository

Just SKILL.md. No reference files, no scripts.

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